Pockels cell driver circuit comprising resistive, inductive or capacitive elements. Bergmann Messgeraete Entwicklung KG. The voltage amplitude can only be varied in time scales in the order of milliseconds. Since the circuit is linear over the time period of a few microseconds, the rising voltage at the Pockels cell can be compensated for by the third resistance R 3 , wherein to be precise the voltage at the beginning and at the end of the opening time of the Pockels cell is set via the third resistance R 3. The functioning of the regenerative amplifier is as follows.

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The delay unit 13 generates control signals 16 and 17 with individually controllable time delays for each control signal.

Pockels Cell Drivers | Gooch & Housego

The Pockels cell system 10 includes a Pockels cell 12 and a controller operably connected to the Pockels cell 12 and including a switching unit 11 and a delay unit According to an aspect the present disclosure relates to an improved driver circuit for a Pockels cell, in particular to such a driver circuit with which the voltage present at the Pockels cell can be manipulated.

However, the gain medium can likewise have an intrinsically high gain, in which case, however, owing to the external constitution, the gain achievable during operation in the case of a single pass through the gain medium has only relatively low values.

The voltage pulse corresponds to a transmissivity pulse for the laser beam that passes an analyzer positioned behind or downstream of the Pockels cell These types of amplifiers are, as an example, described in the German Application No.

A first potential, such as a positive high voltage terminal, is connected via a first switch to a node, which is connectable to a first connector of the Pockels cell. A method and hybrid laser system for producing either of an ultra-short pulse or a short pulse.

A SumoBrain Solutions Company. This switch can either replace the usually used recharging resistors R2 or can be placed to these in parallel. The delay unit receives a trigger signal and generates control signals to the first and second switches.

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CROSS REFERENCE TO RELATED APPLICATION

A small part of the laser pulse can be reflected onto a director 35 e by a beam splitter An important parameter for selecting the type of modulator is the attainable switching time. The electrical control has been modified from the commonly known H-configuration by adding at lest one high voltage switch. In a more general manner, it is also possible to precisely set a pulse train of laser pulses, such that this pulse train of laser pulses provides the desired result when processing a workpiece.

The evaporated material passes through a opening in the mirror into the mass spectrometer. The polarization of the linear polarized laser pulse passing the Pockels cell is orthogonal to the orientation of the polarization selective element behind the Pockels cell, such that the laser pulse is not transmitted.

This alternating sequence is known from German Patent No. The Pockels cell 12 is likewise connected to the second potential P A. Another aspect of the invention features a method of producing short or ultrashort laser pulses of variable amplitude.

Applying a high voltage HV via a high voltage switch 3 the crystal of the Pockels cell 2 turns birefringent, resulting in part of the laser radiation passing through the analyzer 4 to port A, another part to port B, depending on the voltage level.

The laser system of claim 12, wherein the laser light source comprises a laser oscillator that produces laser pulses, and a laser amplifier that amplifies the laser pulses produced by the laser oscillator. The accompanying drawings are provided to ensure a further understanding of embodiments and are integrated into the present description and form part thereof. Laser apparatus and extreme ultraviolet light generation system including the laser apparatus.

Likewise, in this more complex cekl, the second potential may be, instead of a ground terminal, a negative high voltage terminal, while the first potential is a positive high voltage terminal. Furthermore, the regenerative amplifier comprises a pump light sourcefor example a laser diode array, and a lenswhich are arranged outside the resonator.

Using acousto-optical modulators, the switching time is determined by the speed of sound and the diameter of the laser beam.

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The second delay unit 23 is connected to the third and fourth switches S 2 Pocksls and S 2 A of the second push-pull circuit 21 b. The rising and falling edges of the voltage pulse can be shifted in opposite directions, effectively changing the maximum amplitude of the triangular voltage pulse, thus modifying the transmission of a laser pulse through an analyzer.

CONTROLLING POCKELS CELLS – BME MESSGERAETE ENTWICKLUNG KG

The time delays are controlled by analog signals 15 a and 15 b received to pockelx delay units 13 and The second delay unit 23 is connected to the third and fourth switches S 2 B and S 2 A of the second push-pull circuit 21 b. In some applications both transitions from high to low voltage and vice versa must take place within a few nanoseconds, while some other applications only require one of the transitions to be as fast as a few nanoseconds, whereas the other transition can take place also in a time of microseconds.

The time delay of control signal from the first delay unit is controlled by a first analog signal applied to the first delay unit, and the time delay of control signals from the second delay unit is controlled by a second analog signal, applied to the second delay unit.

The delay unit can be controlled in a way that the control signals emanating from the output ports can be delayed by the same time delay. The system of claim 10wherein time delay of control signals from the gme delay unit is controlled by a first analog signal applied to the first delay unit, and wherein time delay of control signals from the second delay unit is controlled by a second analog signal, applied to the second delay unit.

Commonly used devices for switching laser pulses are optical switches or modulators bmee in the beam path within or outside of a laser resonator.